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Werte für Dichte und akustische Impedanz
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Wir haben eine Liste von häufig in der Vakuumindustrie eingesetzten Materialien, deren Dichte und akustischen Impedanzwerte zusammengestellt. Diese Tabelle wurde auf Grundlage des PHYSICS HANDBOOKs und von tatsächlichen Kundenerfahrungen zusammengestellt. Obwohl wir bestrebt sind, die Angaben zu testen, übernimmt INFICON keine Garantie für die Genauigkeit dieser Werte.
Diese Werte gelten nur für die Abscheidungscontroller INFICON Maxtek MDC-360C, MDC-361C, RQCM und MDC-260.
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A B
C D E - G H I - - L M N - P - R S T U V - - Y Z
| Material Name |
Symbol |
Density
gm/cm3 |
Acoustic Z
×105 gm/cm2 sec |
| Aluminum |
Al |
2.700 |
8.170 |
| Aluminum Antimonide |
AlSb |
4.360 |
11.884 |
| Aluminum Oxide |
Al2O3 |
3.970 |
26.280 |
| Antimony |
Sb |
6.620 |
11.490 |
| Arsenic |
As |
5.730 |
9.140 |
| Barium |
Ba |
3.500 |
4.200 |
| Barium Flouride |
BaF2 |
4.886 |
11.135 |
| Barium Nitrate |
BaN2O6 |
3.244 |
7.002 |
| Barium Titanate
(Cubic) |
BaTiO3 |
6.035 |
21.432 |
| Barium Titanate
(Tetr) |
BaTiO3 |
5.999 |
19.030 |
| Beryllium |
Be |
1.850 |
16.260 |
| Bismuth |
Bi |
9.800 |
11.180 |
| Boron |
B |
2.540 |
22.700 |
| Cadmium |
Cd |
8.640 |
12.950 |
| Cadmium Sulfide |
CdS |
4.830 |
8.660 |
| Cadmium Telluride |
CdTe |
5.850 |
9.010 |
| Calcium |
Ca |
1.550 |
3.370 |
| Calcium Fluoride |
CaF2 |
3.180 |
11.390 |
| Calcium Sulfate |
CaSO4 |
2.962 |
9.246 |
| Carbon (Diamond) |
C |
3.520 |
40.140 |
| Carbon (Graphite) |
C |
2.250 |
2.710 |
| Cesium Bromide |
CsBr |
4.456 |
6.262 |
| Cesium Chloride |
CsCl |
3.988 |
6.312 |
| Cesium Iodide |
CsI |
4.516 |
5.726 |
| Cesium Sulfate |
Cs2SO4 |
4.243 |
7.285 |
| Chromium |
Cr |
7.200 |
28.950 |
| Cobalt |
Co |
8.710 |
25.740 |
| Cobalt Oxide |
CoO |
6.440 |
21.432 |
| Copper |
Cu |
8.930 |
20.210 |
| Copper (I) Sulfide
(alpha) |
Cu2S |
5.600 |
12.800 |
| Copper (I) Sulfide
(beta) |
Cu2S |
5.800 |
13.180 |
| Copper (II) Sulfide |
CuS |
4.600 |
10.770 |
| Dysprosium |
Dy |
8.540 |
14.720 |
| Erbium |
Er |
9.050 |
11.930 |
| Gadolinium |
Gd |
7.890 |
13.180 |
| Gallium |
Ga |
5.930 |
14.890 |
| Gallium Arsenide |
GaAs |
5.310 |
5.550 |
| Germanium |
Ge |
5.350 |
17.110 |
| Gold |
Au |
19.300 |
23.180 |
| Hafnium |
Hf |
13.090 |
24.530 |
| Holnium |
Ho |
8.800 |
15.200 |
| Indium |
In |
7.300 |
10.500 |
| Indium Antimonide |
InSb |
5.760 |
11.480 |
| Iridium |
Ir |
22.400 |
68.450 |
| Iron |
Fe |
7.860 |
25.300 |
| Lanthanum |
La |
6.170 |
9.590 |
| Lead |
Pb |
11.300 |
7.810 |
| Lead Flouride |
PbF2 |
8.240 |
13.359 |
| Lead Sulfide |
PbS |
7.500 |
15.600 |
| Lead Telluride |
PbTe |
8.160 |
13.564 |
| Lithium |
Li |
0.530 |
1.500 |
| Lithium Bromicide |
LiBr |
3.470 |
7.179 |
| Lithium Fluoride |
LiF |
2.640 |
11.410 |
| Lithium Niobate |
LiNbO3 |
4.700 |
19.071 |
| Magnesium |
Mg |
1.740 |
5.480 |
| Magnesium Fluoride |
MgF2 |
3.000 |
13.860 |
| Magnesium Oxide |
MgO |
3.580 |
21.480 |
| Manganese |
Mn |
7.200 |
23.420 |
| Manganese (II) Sulfide |
MnS |
3.990 |
9.390 |
| Manganese Oxide |
MnO |
5.390 |
18.908 |
| Mercury |
Hg |
13.460 |
11.930 |
| Molybdenum |
Mo |
10.200 |
34.360 |
| Nickel |
Ni |
8.910 |
26.680 |
| Niobium |
Nb |
8.570 |
17.910 |
| Palladium |
Pd |
12.000 |
24.730 |
| Platinum |
Pt |
21.400 |
36.040 |
| Potassium |
K |
0.860 |
0.867 |
| Potassium Bromide |
KBr |
2.750 |
4.665 |
| Potassium Chloride |
KCl |
1.980 |
4.310 |
| Potassium Iodide |
KI |
3.128 |
4.251 |
| Rhenium |
Re |
21.040 |
58.870 |
| Rhodium |
Rh |
12.410 |
42.050 |
| Rubidium |
Rb |
1.530 |
3.476 |
| Ruthenium |
Ru |
12.362 |
48.516 |
| Samarium |
Sm |
7.540 |
9.920 |
| Scandium |
Sc |
3.000 |
9.700 |
| Selenium |
Se |
4.820 |
10.220 |
| Silicon |
Si |
2.320 |
12.400 |
| Silicon (II) Oxide |
SiO |
2.130 |
10.150 |
| Silicon Dioxide
(fused quartz) |
SiO2 |
2.200 |
8.250 |
| Silver |
Ag |
10.500 |
16.690 |
| Silver Bromide |
AgBr |
6.470 |
7.480 |
| Silver Chloride |
AgCl |
5.560 |
6.690 |
| Sodium |
Na |
0.970 |
1.840 |
| Sodium Chlorate |
NaClO3 |
2.164 |
5.642 |
| Sodium Chloride |
NaCl |
2.170 |
5.620 |
| Sodium Flouride |
NaF |
2.558 |
9.305 |
| Sodium Nitrate |
NaNO3 |
2.270 |
7.395 |
| Strontium Flouride |
SrF2 |
4.277 |
12.146 |
| Strontium Oxide |
SrO |
4.990 |
17.079 |
| Sulphur |
S |
2.070 |
3.860 |
| Tantalum |
Ta |
16.600 |
33.700 |
| Tantalum (IV) Oxide |
Ta2O5 |
8.200 |
29.430 |
| Tellurium |
Te |
6.250 |
9.810 |
| Tellurium Oxide |
TeO2 |
5.990 |
10.244 |
| Terbium |
Tb |
8.270 |
13.380 |
| Thallium |
Tl |
11.850 |
5.700 |
| Thorium |
Th |
11.694 |
18.244 |
| Thorium Dioxide |
ThO2 |
9.860 |
31.092 |
| Tin |
Sn |
7.300 |
12.200 |
| Titanium |
Ti |
4.500 |
14.060 |
| Titanium (IV) Oxide |
TiO2 |
4.260 |
22.070 |
| Tungsten |
W |
19.300 |
54.170 |
| Tungsten Carbide |
WC |
15.600 |
58.480 |
| Uranium |
U |
18.700 |
37.100 |
| Uranium Dioxide |
UO2 |
10.970 |
30.874 |
| Uranium Oxide |
U4O9 |
10.969 |
25.374 |
| Vanadium |
V |
5.960 |
16.660 |
| Ytterbium |
Yb |
6.980 |
7.810 |
| Yttrium |
Y |
4.340 |
10.570 |
| Zinc |
Zn |
7.040 |
17.180 |
| Zinc Oxide |
ZnO |
5.610 |
15.880 |
| Zinc Selenide |
ZnSe |
5.260 |
12.230 |
| Zinc Sulfide |
ZnS |
4.090 |
11.390 |
| Zinc Telluride |
ZnTe |
6.340 |
11.468 |
| Zirconium |
Zr |
6.510 |
14.720 |
| Zirconium Carbide |
ZrC |
6.730 |
33.447 |
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