|
|
Table of Density and Z-Ratio Values
The following information applies to the INFICON IC/5, Cygnus, XTC/3M and XTC/3S Thin Film Deposition Controllers, only.
An * is used to indicate that a Z-Ratio has not been established for a certain material. A value of 1.000 is defaulted in these situations.
Select the first letter of the material name:
A B
C D E - G H I - - L M N - P - R S T U V - - Y Z
|
Formula
|
Density
|
Z-Ratio
|
Material Name
|
|
AlSb
|
4.360
|
0.743
|
Aluminum Antimonide
|
|
Al4 C3
|
2.360
|
*1.000
|
Aluminum Carbide
|
|
AIF
3
|
3.070
|
*1.000
|
Aluminum Fluoride
|
|
AIN
|
3.260
|
*1.000
|
Aluminum Nitride
|
|
Al
2
O
3
|
3.970
|
0.336
|
Aluminum Oxide
|
|
Sb
|
6.620
|
0.768
|
Antimony
|
|
Sb
2
O
3
|
5.200
|
*1.000
|
Antimony Trioxide
|
|
Sb
2
S
3
|
4.640
|
*1.000
|
Antimony Trisulfide
|
|
As
|
5.730
|
0.966
|
Arsenic
|
|
As
2
Se
3
|
4.750
|
*1.000
|
Arsenic Selenide
|
|
Ba
|
3.500
|
2.100
|
Barium
|
|
BaF
2
|
4.886
|
0.793
|
Barium Fluoride
|
|
BaN
2
O
6
|
3.244
|
1.261
|
Barium Nitrate
|
|
BaO
|
5.720
|
*1.000
|
Barium Oxide
|
|
BaTiO
3
|
6.035
|
0.412
|
Barium Titanate (Cubic)
|
|
BaTiO
3
|
5.999
|
0.464
|
Barium Titanate (Tetr)
|
|
Be
|
1.850
|
0.543
|
Beryllium
|
|
BeF
2
|
1.990
|
*1.000
|
Beryllium Fluoride
|
|
BeO
|
3.010
|
*1.000
|
Beryllium Oxide
|
|
Bi
|
9.800
|
0.790
|
Bismuth
|
|
BiF
3
|
5.320
|
*1.000
|
Bismuth Fluoride
|
|
Bi
2
O
3
|
8.900
|
*1.000
|
Bismuth Oxide
|
|
Bi
2
Se
3
|
6.820
|
*1.000
|
Bismuth Selenide
|
|
Bi
2
Te
3
|
7.700
|
*1.000
|
Bismuth Telluride
|
|
Bi
2
S
3
|
7.390
|
*1.000
|
Bismuth Trisulphide
|
|
B
|
2.370
|
0.389
|
Boron
|
|
B
4
C
|
2.370
|
*1.000
|
Boron Carbide
|
|
BN
|
1.860
|
*1.000
|
Boron Nitride
|
|
B
2
0
3
|
1.820
|
*1.000
|
Boron Oxide
|
|
Cd
|
8.640
|
0.682
|
Cadmium
|
|
CdF
2
|
6.640
|
*1.000
|
Cadmium Fluoride
|
|
CdO
|
8.150
|
*1.000
|
Cadmium Oxide
|
|
CdSe
|
5.810
|
*1.000
|
Cadmium Selenide,
|
|
CdS
|
4.830
|
1.020
|
Cadmium Sulfide
|
|
CdTe
|
6.200
|
0.980
|
Cadmium Telluride
|
|
Ca
|
1.550
|
2.620
|
Calcium
|
|
CaF
2
|
3.180
|
0.775
|
Calcium Fluoride
|
|
CaO
|
3.350
|
*1.000
|
Calcium Oxide
|
|
CaO-SiO
2
|
2.900
|
*1.000
|
Calcium Silicate (3)
|
|
CaSO
4
|
2.962
|
0.955
|
Calcium Sulfate
|
|
CaTiO
3
|
4.100
|
*1.000
|
Calcium Titanate
|
|
CaWO
4
|
6.060
|
*1.000
|
Calcium Tungstate
|
|
C
|
3.520
|
0.220
|
Carbon (Diamond)
|
|
C
|
2.250
|
3.260
|
Carbon (Graphite)
|
|
Ce
|
6.780
|
*1.000
|
Cerium
|
|
CeF
3
|
6.160
|
*1.000
|
Cerium (III) Fluoride
|
|
CeO
2
|
7.130
|
*1.000
|
Cerium (IV) Dioxide
|
|
Cs
|
1.870
|
*1.000
|
Cesium
|
|
CsBr
|
4.456
|
1.410
|
Cesium Bromide
|
|
CsCI
|
3.988
|
1.399
|
Cesium Chloride
|
|
CsI
|
4.516
|
1.542
|
Cesium Iodide
|
|
Cs
2
SO
4
|
4.243
|
1.212
|
Cesium Sulfate
|
|
Na
5
Al
3
F
14
|
2.900
|
*1.000
|
Chiolite
|
|
Cr
|
7.200
|
0.305
|
Chromium
|
|
Cr
2
O
3
|
5.210
|
*1.000
|
Chromium (III) Oxide
|
|
CrB
|
6.170
|
*1.000
|
Chromium Boride
|
|
Cr
3
C
2
|
6.680
|
*1.000
|
Chromium Carbide
|
|
Co
|
8.900
|
0.343
|
Cobalt
|
|
CoO
|
6.440
|
0.412
|
Cobalt Oxide
|
|
Cu
|
8.930
|
0.437
|
Copper
|
|
Cu
2
S
|
5.600
|
0.690
|
Copper (I) Sulfide (Alpha)
|
|
Cu
2
S
|
5.800
|
0.670
|
Copper (I) Sulfide (Beta)
|
|
CuS
|
4.600
|
0.820
|
Copper (II) Sulfide
|
|
Cu
2
O
|
6.000
|
*1.000
|
Copper Oxide
|
|
Na
3
AIF
6
|
2.900
|
*1.000
|
Cryolite
|
|
Dy
|
8.550
|
0.600
|
Dysprosium
|
|
DY
2
O
3
|
7.810
|
*1.000
|
Dysprosium Oxide
|
|
Er
|
9.050
|
0.740
|
Erbium
|
|
Er
2
O
3
|
8.640
|
*1.000
|
Erbium Oxide
|
|
Eu
|
5.260
|
*1.000
|
Europium
|
|
EuF
2
|
6.500
|
*1.000
|
Europium Fluoride
|
|
Gd
|
7.890
|
0.670
|
Gadolinium
|
|
Gd
2
O
3
|
7.410
|
*1.000
|
Gadolinium Oxide
|
|
Ga
|
5.930
|
0.593
|
Gallium
|
|
GaSb
|
5.600
|
*1.000
|
Gallium Antimonide
|
|
GaAs
|
5.310
|
1.590
|
Gallium Arsenide
|
|
GaN
|
6.100
|
*1.000
|
Gallium Nitride
|
|
Ga
2
O
3
|
5.880
|
*1.000
|
Gallium Oxide (B)
|
|
GaP
|
4.100
|
*1.000
|
Gallium Phosphide
|
|
Ge
|
5.350
|
0.516
|
Germanium
|
|
Ge
3
N
2
|
5.200
|
*1.000
|
Germanium Nitride
|
|
GeO
2
|
6.240
|
*1.000
|
Germanium Oxide
|
|
GeTe
|
6.200
|
*1.000
|
Germanium Telluride
|
|
Au
|
19.300
|
0.381
|
Gold
|
|
Hf
|
13.090
|
0.360
|
Hafnium
|
|
HfB
2
|
10.500
|
*1.000
|
Hafnium Boride,
|
|
HfC
|
12.200
|
*1.000
|
Hafnium Carbide
|
|
HfN
|
13.800
|
*1.000
|
Hafnium Nitride
|
|
HfO
2
|
9.680
|
*1.000
|
Hafnium Oxide
|
|
HfSi
2
|
7.200
|
*1.000
|
Hafnium Silicide
|
|
Ho
|
8.800
|
0.580
|
Holminum
|
|
Ho
2
O
3
|
8.410
|
*1.000
|
Holminum Oxide
|
|
NiCrFe
|
8.500
|
*1.000
|
Inconel
|
|
In
|
7.300
|
0.841
|
Indium
|
|
InSb
|
5.760
|
0.769
|
Indium Antimonide
|
|
InAs
|
5.700
|
*1.000
|
Indium Arsenide
|
|
InP
|
4.800
|
*1.000
|
Indium Phosphide
|
|
In
2
Se
3
|
5.700
|
*1.000
|
Indium Selenide
|
|
In
2
Te
3
|
5.800
|
*1.000
|
Indium Telluride
|
|
In
2
O
3
|
7.180
|
*1.000
|
Indiurn Sesquioxide,
|
|
Ir
|
22.400
|
0.129
|
Iridium
|
|
Fe
|
7.860
|
0.349
|
Iron
|
|
FeO
|
5.700
|
*1.000
|
Iron Oxide
|
|
FeS
|
4.840
|
*1.000
|
Iron Sulphide
|
|
La
|
6.170
|
0.920
|
Lanthanum
|
|
LaF
3
|
5.940
|
*1.000
|
Lanthanum Fluoride
|
|
La
2
O
3
|
6.510
|
*1.000
|
Lanthanum Oxide
|
|
LaB
6
|
2.610
|
*1.000
|
Lanthanurn Boride
|
|
Pb
|
11.300
|
1.130
|
Lead
|
|
PbCl
2
|
5.850
|
*1.000
|
Lead Chloride
|
|
PbF
2
|
8.240
|
0.661
|
Lead Fluoride
|
|
PbO
|
9.530
|
*1.000
|
Lead Oxide
|
|
PbSe
|
8.100
|
*1.000
|
Lead Selenide
|
|
PbSnO
3
|
8.100
|
*1.000
|
Lead Stannate
|
|
PbS
|
7.500
|
0.566
|
Lead Sulfide
|
|
PbTe
|
8.160
|
0.651
|
Lead Telluride
|
|
Li
|
0.530
|
5.900
|
Lithium
|
|
LiBr
|
3.470
|
1.230
|
Lithium Bromide
|
|
LiF
|
2.638
|
0.778
|
Lithium Fluoride
|
|
LiNbO
3
|
4.700
|
0.463
|
Lithium Niobate
|
|
Lu
|
9.840
|
*1.000
|
Lutetium
|
|
Mg
|
1.740
|
1.610
|
Magnesium
|
|
MgAl
2
O
4
|
3.600
|
*1.000
|
Magnesium Aluminate
|
|
MgF
2
|
3.180
|
0.637
|
Magnesium Fluoride
|
|
MgO
|
3.580
|
0.411
|
Magnesium Oxide
|
|
Mn
|
7.200
|
0.377
|
Manganese
|
|
MnS
|
3.990
|
0.940
|
Manganese (II) Sulfide
|
|
MnO
|
5.390
|
0.467
|
Manganese Oxide
|
|
Hg
|
13.460
|
0.740
|
Mercury
|
|
Mo
|
10.200
|
0.257
|
Molybdenum
|
|
MoB
2
|
7.120
|
*1.000
|
Molybdenum Boride
|
|
Mo
2
C
|
9.180
|
*1.000
|
Molybdenum Carbide
|
|
MoS
2
|
4.800
|
*1.000
|
Molybdenum Disulfide
|
|
MoO
3
|
4.700
|
*1.000
|
Molybdenum Trioxdide
|
|
Nd
|
7.000
|
*1.000
|
Neodynium
|
|
NdF
3
|
6.506
|
*1.000
|
Neodynium Fluoride
|
|
Nd
2
O
3
|
7.240
|
*1.000
|
Neodynium Oxide
|
|
NiCr
|
8.500
|
*1.000
|
Nichrome
|
|
Ni
|
8.910
|
0.331
|
Nickel
|
|
NiO
|
7.450
|
*1.000
|
Nickel Oxide
|
|
Nb
|
8.578
|
0.492
|
Niobium (Columbium)
|
|
Nb
2
O
5
|
4.470
|
*1.000
|
Niobium (V) Oxide
|
|
NbB
2
|
6.970
|
*1.000
|
Niobium Boride
|
|
NbC
|
7.820
|
*1.000
|
Niobium Carbide
|
|
NbN
|
8.400
|
*1.000
|
Niobium Nitride
|
|
Nb
2
O
3
|
7.500
|
*1.000
|
Niobium Trioxide
|
|
Pd
|
12.038
|
0.357
|
Palladium
|
|
PdO
|
8.310
|
*1.000
|
Palladium Oxide
|
|
C
8
H
8
|
1.100
|
*1.000
|
Parlyene (Union Carbide)
|
|
NiFe
|
8.700
|
*1.000
|
Permalloy
|
|
P
3
N
5
|
2.510
|
*1.000
|
Phosphorus Nitride
|
|
Pt
|
21.400
|
0.245
|
Platinum
|
|
PtO
2
|
10.200
|
*1.000
|
Platinum Oxide
|
|
Po
|
9.400
|
*1.000
|
Polonium
|
|
K
|
0.860
|
10.189
|
Potassium
|
|
KBr
|
2.750
|
1.893
|
Potassium Bromide
|
|
KCI
|
1.980
|
2.050
|
Potassium Chloride
|
|
KF
|
2.480
|
*1.000
|
Potassium Fluoride
|
|
KI
|
3.128
|
2.077
|
Potassium Iodide
|
|
Pr
|
6.780
|
*1.000
|
Praseodymium
|
|
Pr
2
O
3
|
6.880
|
*1.000
|
Praseodymium Oxide
|
|
Ra
|
5.000
|
*1.000
|
Radium
|
|
Re
|
21.040
|
0.150
|
Rhenium
|
|
Rh
|
12.410
|
0.210
|
Rhodium
|
|
Rb
|
1.530
|
2.540
|
Rubidium
|
|
RbI
|
3.550
|
*1.000
|
Rubidiurn Iodide
|
|
Ru
|
12.362
|
0.182
|
Ruthenium
|
|
Sm
|
7.540
|
0.890
|
Samarium
|
|
Sm
2
O
3
|
7.430
|
*1.000
|
Samarium Oxide
|
|
Sc
|
3.000
|
0.910
|
Scandium
|
|
Sc
2
O
3
|
3.860
|
*1.000
|
Scandium Oxide
|
|
Se
|
4.810
|
0.864
|
Selenium
|
|
Si
|
2.320
|
0.712
|
Silicon
|
|
SiO
|
2.130
|
0.870
|
Silicon (II) Oxide
|
|
SiC
|
3.220
|
*1.000
|
Silicon Carbide
|
|
SiO
2
|
2.648
|
1.000
|
Silicon Dioxide
|
|
Si
3
N
4
|
3.440
|
*1.000
|
Silicon Nitride
|
|
Ag
|
10.500
|
0.529
|
Silver
|
|
AgBr
|
6.470
|
1.180
|
Silver Bromide
|
|
AgCl
|
5.560
|
1.320
|
Silver Chloride
|
|
Na
|
0.970
|
4.800
|
Sodium
|
|
NaBr
|
3.200
|
*1.000
|
Sodium Bromide
|
|
NaCIO
3
|
2.164
|
1.565
|
Sodium Chlorate
|
|
NaCl
|
2.170
|
1.570
|
Sodium Chloride
|
|
NaF
|
2.558
|
0.949
|
Sodium Fluoride
|
|
NaNO
3
|
2.270
|
1.194
|
Sodium Nitrate
|
|
MgAl
2
O
6
|
8.000
|
*1.000
|
Spinel
|
|
Sr
|
2.600
|
*1.000
|
Strontium
|
|
SrF
2
|
4.277
|
0.727
|
Strontium Fluroide
|
|
SrO
|
4.990
|
0.517
|
Strontium Oxide
|
|
S
8
|
2.070
|
2.290
|
Sulphur
|
|
NiFeMo
|
8.900
|
*1.000
|
Supermalloy
|
|
Ta
|
16.600
|
0.262
|
Tantalum
|
|
Ta
2
O
5
|
8.200
|
0.300
|
Tantalum (V) Oxide
|
|
TaB
2
|
11.150
|
*1.000
|
Tantalum Boride
|
|
TaC
|
13.900
|
*1.000
|
Tantalum Carbide
|
|
TaN
|
16.300
|
*1.000
|
Tantalum Nitride
|
|
Tc
|
11.500
|
*1.000
|
Technetium
|
|
Te
|
6.250
|
0.900
|
Tellurium
|
|
TeO
2
|
5.990
|
0.862
|
Tellurium Oxide
|
|
Tb
|
8.270
|
0.660
|
Terbium
|
|
TI
|
11.850
|
1.550
|
Thallium
|
|
TIBr
|
7.560
|
*1.000
|
Thallium Bromide
|
|
TICI
|
7.000
|
*1.000
|
Thallium Chloride
|
|
TII
|
7.090
|
*1.000
|
Thalliurn Iodide (B)
|
|
Th
|
11.694
|
0.484
|
Thorium
|
|
ThO
2
|
9.860
|
0.284
|
Thorium Dioxide
|
|
ThOF
2
|
9.100
|
*1.000
|
Thorium Oxyfluoride
|
|
ThF
4
|
6.320
|
*1.000
|
Thorium.(IV) Fluoride
|
|
Sn
|
7.300
|
0.724
|
Tin
|
|
SnO
2
|
6.950
|
*1.000
|
Tin Oxide
|
|
SnSe
|
6.180
|
*1.000
|
Tin Selenide
|
|
SnS
|
5.080
|
*1.000
|
Tin Sulfide
|
|
SnTe
|
6.440
|
*1.000
|
Tin Telluride
|
|
Ti
|
4.500
|
0.628
|
Titanium
|
|
TiO
2
|
4.260
|
0.400
|
Titanium (IV) Oxide
|
|
TiB
2
|
4.500
|
*1.000
|
Titanium Boride
|
|
TiC
|
4.930
|
*1.000
|
Titanium Carbide
|
|
TiN
|
5.430
|
*1.000
|
Titanium Nitride
|
|
TiO
|
4.900
|
*1.000
|
Titanium Oxide
|
|
Ti
2
0
3
|
4.600
|
*1.000
|
Titanium Sesquioxide
|
|
U
3
O
8
|
8.300
|
*1.000
|
Tri Uranium Octoxide
|
|
W
|
19.300
|
0.163
|
Tungsten
|
|
WB
2
|
10.770
|
*1.000
|
Tungsten Boride
|
|
WC
|
15.600
|
0.151
|
Tungsten Carbide
|
|
WS
2
|
7.500
|
*1.000
|
Tungsten Disulphide
|
|
WSi
2
|
9.400
|
*1.000
|
Tungsten Silicide
|
|
WO
3
|
7.160
|
*1.000
|
Tungsten Trioxide
|
|
U
|
19.050
|
0.238
|
Uranium
|
|
UO
2
|
10.970
|
0.286
|
Uranium Dioxide
|
|
U
4
O
9
|
10.969
|
0.348
|
Uranium Oxide
|
|
V
|
5.960
|
0.530
|
Vanadium
|
|
VB
2
|
5.100
|
*1.000
|
Vanadium Boride
|
|
VC
|
5.770
|
*1.000
|
Vanadium Carbide
|
|
VO
2
|
4.340
|
*1.000
|
Vanadium Dioxide
|
|
VN
|
6.130
|
*1.000
|
Vanadium Nitride
|
|
V
2
O
5
|
3.360
|
*1.000
|
Vanadium Pentoxide
|
|
Yb
|
6.980
|
1.130
|
Ytterbium
|
|
Yb
2
O
3
|
9.170
|
*1.000
|
Ytterbium Oxide
|
|
Y
|
4.340
|
0.835
|
Yttrium
|
|
Y
2
0
3
|
5.010
|
*1.000
|
Yttrium Oxide
|
|
Zn
|
7.040
|
0.514
|
Zinc
|
|
Zn
3
Sb
2
|
6.300
|
*1.000
|
Zinc Antimonide
|
|
ZnF
2
|
4.950
|
*1.000
|
Zinc Fluoride
|
|
ZnO
|
5.610
|
0.556
|
Zinc Oxide
|
|
ZnSe
|
5.260
|
0.722
|
Zinc Selenide
|
|
ZnS
|
4.090
|
0.775
|
Zinc Sulfide
|
|
ZnTe
|
6.340
|
0.770
|
Zinc Telluride
|
|
Zr
|
6.490
|
0.600
|
Zirconium
|
|
ZrB
2
|
6.080
|
*1.000
|
Zirconium Boride
|
|
ZrC
|
6.730
|
0.264
|
Zirconium Carbide
|
|
ZrN
|
7.090
|
*1.000
|
Zirconium Nitride
|
|
ZrO
2
|
5.600
|
*1.000
|
Zirconium Oxide
|
|
|
