INFICON Worldwide
Home   |   Product Index   |   Support   |   Library   |   Calendar   |   News

  Semiconductor & Vacuum Coating Process

Customer Support | Technical Info | Calendar | Product News  


> Electron Beam Gun Crucible Indexer
> FabGuard Suite
> In Situ Particle Detectors
> Integrated Process Monitoring
> Leak Detectors
> Quartz Monitor Crystals
> RF Sensing Technology with FabGuard
> Residual Gas Analyzers
>Thin Film Deposition Controllers/QCM
> Vacuum Components
> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems

Sensor and Feedthrough Packages

More Information About Our Thin Film Deposition QCM Instruments
Our line of INFICON and Maxtek sensors and feedthroughs offer proven quality and durability. Our standard, compact, dual, CrystalSix, and Crystal 12 sensors are assembled mechanically rather than soldered together, so you can replace their parts conveniently in the field if necessary. Maxtek sensors employ the "cool drawer" crystal holder allowing insertion of the monitor crystal from the sensor side. INFICON sensors allow insertion of the monitor crystal in a front loading orientation.

System installations require a feedthrough package that conforms to specific customer requirements. INFICON offers both 1" bolt and 2-3/4" ConFlat flange. Each package has been designed for maximum customer flexiblity. Contact us, and we'll help you choose precisely the right sensor or feedthrough for your process.

Learn more about our sensors and feedthroughs:

Maxtek ASF-140/ASF-141 Adjustable Single Sensor Head/Feedthrough

Maxtek BDS-250/BDS-251 Bakeable Dual Sensor Head/Feedthrough

Maxtek BSH-150/BSH-151 Bakeable Single Sensor Head/Feedthrough

Maxtek DSH5P1 Dual Sensor Head/Feedthrough

Maxtek RSH-600 Rotary Sensor Head

Maxtek SF-120 Combo Sensor Head/Feedthrough

Maxtek SH-101/102 and IF-111/IF-276 Single Sensor Heads/Feedthroughs

Maxtek SS-104 Single Shutter

Crystal 12 Sensor for Quartz Crystal Deposition Controllers


ASSOCIATED TECHNICAL INFORMATION:



 Application Note - Shuttered Crystal Sensors
 Brochure - INFICON Crystal 12 Sensor for Quartz Crystal Deposition Controllers
 Brochure - Maxtek ASF-140/ASF-141 Adjustable Single Sensor Head/Feedthrough
 Brochure - Maxtek BDS-250/BDS-251 Bakeable Dual Sensor Head/Feedthrough
 Brochure - Maxtek BSH-150/BSH-151 Bakeable Single Sensor Head Feedthrough
 Brochure - Maxtek DSH5P1 Dual Sensor Head/Feedthrough
 Brochure - Maxtek RSH-600 Rotary Sensor Head
 Brochure - Maxtek SF-120 Combo Sensor Head/Feedthrough
 Brochure - Maxtek SH-101/102, IF-111/IF-276 Single Sensor Heads/Feedthroughs
 Brochure - Maxtek SS-104 Single Shutter
 Installation and Service Manual - Sensor Heads
 Instruction Sheet - CrystalTwo Sensor
 Instruction Sheet - How to Install a Crystal
 Operating Manual - Bakeable Crystal Sensor
 Operating Manual - Crystal 12 Sensor
 Operating Manual - CrystalSix Sensor
 Operating Manual - RSH-600 Rotary Sensor Head
 Operating Manual - Sputtering Crystal Sensor
 Operating Manual - Standard Compact Dual Sensors

I'd like someone to call me to discuss my application.