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> Electron Beam Gun Crucible Indexer
> FabGuard Software Suite
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> Quartz Crystal Sensors
> Quartz Monitor Crystals
> RF Sensing Technology
> Research Quartz Crystal Microbalance (RQCM)
> Residual Gas Analyzers
> Thin Film Deposition Controllers/Monitors
 
•  Cool Drawer Dual Sensor
•  Cool Drawer Single Sensor
•  Crystal 12 Sensor
•  CrystalSix Sensor
•  Cygnus 2 Thin Film Deposition Controller
•  DCM-250 Software
•  Front Load Bakeable Sensor
•  Front Load Dual Sensor
•  Front Load Single Sensor
•  IC6 Thin Film Deposition Controller
•  Q-pod Quartz Crystal Monitor
•  Quartz Crystals
•  RQCM
•  RSH-600 Rotary Sensor Head
•  SQC310 Thin Film Deposition Controller
•  SQM160 Multi-Film Rate/Thickness Monitor
•  SQM242 Thin Film Co-Deposition Controller Card
•  Sensor and Feedthrough Packages
•  Sputtering Sensor
•  XTC/3 Thin Film Deposition Controller
   
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Sensor and Feedthrough Packages

Our line of INFICON sensors and feedthroughs offer proven quality and durability. Our standard, compact, dual, CrystalSix, and Crystal 12 sensors are assembled mechanically rather than soldered together, so you can replace their parts conveniently in the field if necessary. Our sensors employ the "cool drawer" crystal holder allowing insertion of the monitor crystal from the sensor side or sensors that allow insertion of the monitor crystal in a front loading orientation.

System installations require a feedthrough package that conforms to specific customer requirements. INFICON offers both 1" bolt and 2-3/4" ConFlat flange. Each package has been designed for maximum customer flexibility. Contact us, and we'll help you choose precisely the right sensor or feedthrough for your process.

Learn more about our sensors and feedthroughs:

Cool Drawer Single Sensor

Cool Drawer Dual Sensor

Front Load Single Sensor

Front Load Dual Sensor

Front Load Bakeable Sensor

RSH-600 Rotary Sensor Head

Sputtering Sensor

CrystalSix Sensor

Crystal 12 Sensor



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ASSOCIATED TECHNICAL INFORMATION

Brochures and Datasheets:

   Datasheet - Cool Drawer Dual Sensor
English

   Datasheet - Cool Drawer Single Sensor
English

   Datasheet - Crystal 12 Sensor
English

   Datasheet - CrystalSix Sensor
English

   Datasheet - Front Load Bakeable Sensor
English

   Datasheet - Front Load Dual Sensor
English

   Datasheet - Front Load Single Sensor
English

   Datasheet - RSH-600 Sensor
English

   Datasheet - Sputtering Sensor
English

Catalogs:

   Catalog - Thin Film Deposition Controllers, Monitors and Accessories
English | Chinese

Operations and Maintenance Manuals:

   Installation and Service Manual - Cool Drawer Sensor Heads
English

Technical Information:

   Application Note - Shuttered Crystal Sensors
English

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More Information About Our Thin Film Deposition QCM Instruments
Thin Film Deposition Controllers, Monitors and Accessories Catalog


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