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>Thin Film Deposition Controllers/QCM
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> Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems

Sensor and Feedthrough Packages

More Information About Our Thin Film Deposition QCM Instruments
Our line of INFICON and Maxtek sensors and feedthroughs offer proven quality and durability. Our standard, compact, dual, CrystalSix, and Crystal 12 sensors are assembled mechanically rather than soldered together, so you can replace their parts conveniently in the field if necessary. Maxtek sensors employ the "cool drawer" crystal holder allowing insertion of the monitor crystal from the sensor side. INFICON sensors allow insertion of the monitor crystal in a front loading orientation.

System installations require a feedthrough package that conforms to specific customer requirements. INFICON offers both 1" bolt and 2-3/4" ConFlat flange. Each package has been designed for maximum customer flexiblity. Contact us, and we'll help you choose precisely the right sensor or feedthrough for your process.

Learn more about our sensors and feedthroughs:

Cool Drawer (Maxtek) Single Sensor Head/Feedthrough

Cool Drawer (Maxtek) Dual Sensor Head/Feedthrough

Front Load (INFICON) Single Sensor

Front Load (INFICON) Dual Sensor

Front Load (INFICON) Bakeable Sensor

RSH-600 Rotary Sensor Head

Sputtering Sensor

CrystalSix Sensor

Crystal 12 Sensor


ASSOCIATED TECHNICAL INFORMATION:



 Application Note - Shuttered Crystal Sensors
 Datasheet - Cool Drawer (Maxtek) Dual Sensor
 Datasheet - Cool Drawer (Maxtek) Single Sensor
 Datasheet - Crystal 12 Sensor
 Datasheet - CrystalSix Sensor
 Datasheet - Front Load (INFICON) Bakeable Sensor
 Datasheet - Front Load (INFICON) Dual Sensor
 Datasheet - Front Load (INFICON) Single Sensor
 Datasheet - RSH-600 Sensor
 Datasheet - Sputtering Sensor
 Installation and Service Manual - Cool Drawer Sensor Heads
 Instruction Sheet - CrystalTwo Sensor
 Operating Manual - Bakeable Crystal Sensor
 Operating Manual - Crystal 12 Sensor
 Operating Manual - CrystalSix Sensor
 Operating Manual - Front Load Single and Dual Sensors
 Operating Manual - RSH-600 Rotary Sensor Head
 Operating Manual - Sputtering Crystal Sensor

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