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密度和声阻抗值
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我们汇编了一份真空工业一些常用材料列表，并提供了相应的材料密度和声阻值。 此表是结合《物理学手册》(PHYSICS HANDBOOK) 及客户经验而汇编。 尽管我们尽最大努力对其进行测试，不过 INFICON 不保证这些值的准确性。
这些值仅适用于 INFICON Maxtek MDC-360C、MDC-361C、RQCM 和 MDC-260 沉积控制器。
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A B
C D E - G H I - - L M N - P - R S T U V - - Y Z
| Material Name |
Symbol |
Density
gm/cm3 |
Acoustic Z
×105 gm/cm2 sec |
| Aluminum |
Al |
2.700 |
8.170 |
| Aluminum Antimonide |
AlSb |
4.360 |
11.884 |
| Aluminum Oxide |
Al2O3 |
3.970 |
26.280 |
| Antimony |
Sb |
6.620 |
11.490 |
| Arsenic |
As |
5.730 |
9.140 |
| Barium |
Ba |
3.500 |
4.200 |
| Barium Flouride |
BaF2 |
4.886 |
11.135 |
| Barium Nitrate |
BaN2O6 |
3.244 |
7.002 |
| Barium Titanate
(Cubic) |
BaTiO3 |
6.035 |
21.432 |
| Barium Titanate
(Tetr) |
BaTiO3 |
5.999 |
19.030 |
| Beryllium |
Be |
1.850 |
16.260 |
| Bismuth |
Bi |
9.800 |
11.180 |
| Boron |
B |
2.540 |
22.700 |
| Cadmium |
Cd |
8.640 |
12.950 |
| Cadmium Sulfide |
CdS |
4.830 |
8.660 |
| Cadmium Telluride |
CdTe |
5.850 |
9.010 |
| Calcium |
Ca |
1.550 |
3.370 |
| Calcium Fluoride |
CaF2 |
3.180 |
11.390 |
| Calcium Sulfate |
CaSO4 |
2.962 |
9.246 |
| Carbon (Diamond) |
C |
3.520 |
40.140 |
| Carbon (Graphite) |
C |
2.250 |
2.710 |
| Cesium Bromide |
CsBr |
4.456 |
6.262 |
| Cesium Chloride |
CsCl |
3.988 |
6.312 |
| Cesium Iodide |
CsI |
4.516 |
5.726 |
| Cesium Sulfate |
Cs2SO4 |
4.243 |
7.285 |
| Chromium |
Cr |
7.200 |
28.950 |
| Cobalt |
Co |
8.710 |
25.740 |
| Cobalt Oxide |
CoO |
6.440 |
21.432 |
| Copper |
Cu |
8.930 |
20.210 |
| Copper (I) Sulfide
(alpha) |
Cu2S |
5.600 |
12.800 |
| Copper (I) Sulfide
(beta) |
Cu2S |
5.800 |
13.180 |
| Copper (II) Sulfide |
CuS |
4.600 |
10.770 |
| Dysprosium |
Dy |
8.540 |
14.720 |
| Erbium |
Er |
9.050 |
11.930 |
| Gadolinium |
Gd |
7.890 |
13.180 |
| Gallium |
Ga |
5.930 |
14.890 |
| Gallium Arsenide |
GaAs |
5.310 |
5.550 |
| Germanium |
Ge |
5.350 |
17.110 |
| Gold |
Au |
19.300 |
23.180 |
| Hafnium |
Hf |
13.090 |
24.530 |
| Holnium |
Ho |
8.800 |
15.200 |
| Indium |
In |
7.300 |
10.500 |
| Indium Antimonide |
InSb |
5.760 |
11.480 |
| Iridium |
Ir |
22.400 |
68.450 |
| Iron |
Fe |
7.860 |
25.300 |
| Lanthanum |
La |
6.170 |
9.590 |
| Lead |
Pb |
11.300 |
7.810 |
| Lead Flouride |
PbF2 |
8.240 |
13.359 |
| Lead Sulfide |
PbS |
7.500 |
15.600 |
| Lead Telluride |
PbTe |
8.160 |
13.564 |
| Lithium |
Li |
0.530 |
1.500 |
| Lithium Bromicide |
LiBr |
3.470 |
7.179 |
| Lithium Fluoride |
LiF |
2.640 |
11.410 |
| Lithium Niobate |
LiNbO3 |
4.700 |
19.071 |
| Magnesium |
Mg |
1.740 |
5.480 |
| Magnesium Fluoride |
MgF2 |
3.000 |
13.860 |
| Magnesium Oxide |
MgO |
3.580 |
21.480 |
| Manganese |
Mn |
7.200 |
23.420 |
| Manganese (II) Sulfide |
MnS |
3.990 |
9.390 |
| Manganese Oxide |
MnO |
5.390 |
18.908 |
| Mercury |
Hg |
13.460 |
11.930 |
| Molybdenum |
Mo |
10.200 |
34.360 |
| Nickel |
Ni |
8.910 |
26.680 |
| Niobium |
Nb |
8.570 |
17.910 |
| Palladium |
Pd |
12.000 |
24.730 |
| Platinum |
Pt |
21.400 |
36.040 |
| Potassium |
K |
0.860 |
0.867 |
| Potassium Bromide |
KBr |
2.750 |
4.665 |
| Potassium Chloride |
KCl |
1.980 |
4.310 |
| Potassium Iodide |
KI |
3.128 |
4.251 |
| Rhenium |
Re |
21.040 |
58.870 |
| Rhodium |
Rh |
12.410 |
42.050 |
| Rubidium |
Rb |
1.530 |
3.476 |
| Ruthenium |
Ru |
12.362 |
48.516 |
| Samarium |
Sm |
7.540 |
9.920 |
| Scandium |
Sc |
3.000 |
9.700 |
| Selenium |
Se |
4.820 |
10.220 |
| Silicon |
Si |
2.320 |
12.400 |
| Silicon (II) Oxide |
SiO |
2.130 |
10.150 |
| Silicon Dioxide
(fused quartz) |
SiO2 |
2.200 |
8.250 |
| Silver |
Ag |
10.500 |
16.690 |
| Silver Bromide |
AgBr |
6.470 |
7.480 |
| Silver Chloride |
AgCl |
5.560 |
6.690 |
| Sodium |
Na |
0.970 |
1.840 |
| Sodium Chlorate |
NaClO3 |
2.164 |
5.642 |
| Sodium Chloride |
NaCl |
2.170 |
5.620 |
| Sodium Flouride |
NaF |
2.558 |
9.305 |
| Sodium Nitrate |
NaNO3 |
2.270 |
7.395 |
| Strontium Flouride |
SrF2 |
4.277 |
12.146 |
| Strontium Oxide |
SrO |
4.990 |
17.079 |
| Sulphur |
S |
2.070 |
3.860 |
| Tantalum |
Ta |
16.600 |
33.700 |
| Tantalum (IV) Oxide |
Ta2O5 |
8.200 |
29.430 |
| Tellurium |
Te |
6.250 |
9.810 |
| Tellurium Oxide |
TeO2 |
5.990 |
10.244 |
| Terbium |
Tb |
8.270 |
13.380 |
| Thallium |
Tl |
11.850 |
5.700 |
| Thorium |
Th |
11.694 |
18.244 |
| Thorium Dioxide |
ThO2 |
9.860 |
31.092 |
| Tin |
Sn |
7.300 |
12.200 |
| Titanium |
Ti |
4.500 |
14.060 |
| Titanium (IV) Oxide |
TiO2 |
4.260 |
22.070 |
| Tungsten |
W |
19.300 |
54.170 |
| Tungsten Carbide |
WC |
15.600 |
58.480 |
| Uranium |
U |
18.700 |
37.100 |
| Uranium Dioxide |
UO2 |
10.970 |
30.874 |
| Uranium Oxide |
U4O9 |
10.969 |
25.374 |
| Vanadium |
V |
5.960 |
16.660 |
| Ytterbium |
Yb |
6.980 |
7.810 |
| Yttrium |
Y |
4.340 |
10.570 |
| Zinc |
Zn |
7.040 |
17.180 |
| Zinc Oxide |
ZnO |
5.610 |
15.880 |
| Zinc Selenide |
ZnSe |
5.260 |
12.230 |
| Zinc Sulfide |
ZnS |
4.090 |
11.390 |
| Zinc Telluride |
ZnTe |
6.340 |
11.468 |
| Zirconium |
Zr |
6.510 |
14.720 |
| Zirconium Carbide |
ZrC |
6.730 |
33.447 |
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